Remove the side cover of vacuum room: pull out 70 C, hold firmly, lift it slowly.Remove the vacuum room and pump:Agilent always took it apart separatelyBut for me, recommemed remove them together by un-screw the six screws
Trun left a little bit, put the EGM back to remove the EGM
Remove the slot and vacuum line on the pump: anti-clickwise to take it down Ask Co-worker for help : hold the whole vacuum room first, to pull out the turbo pumpReplace the new end-cap, careful put them back. Enclose a back view of all the connections. <See (1) at May-16-2008>
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